发明名称 |
OPTICAL BEAM DEFLECTING ELEMENT, ILLUMINATION SYSTEM INCLUDING SAME, AND RELATED METHOD |
摘要 |
An optical beam deflecting element may be used effectively as an energy distribution manipulator in an illumination system to vary the energy distribution within a given spatial intensity distribution in a pupil plane of the illumination system substantially without changing the shape and size and position of illuminated areas in the pupil plane. |
申请公布号 |
US2012249988(A1) |
申请公布日期 |
2012.10.04 |
申请号 |
US201213358158 |
申请日期 |
2012.01.25 |
申请人 |
RUNDE DANIEL;DOLL FLORIAN;VOELKEL REINHARD;WEIBLE KENNETH;WEISS GUNDULA;GERHARD MICHAEL;CARL ZEISS SMT GMBH |
发明人 |
RUNDE DANIEL;DOLL FLORIAN;VOELKEL REINHARD;WEIBLE KENNETH;WEISS GUNDULA;GERHARD MICHAEL |
分类号 |
G03B27/54;G02B26/08;G03B27/32 |
主分类号 |
G03B27/54 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|