METHOD FOR MANUFACTURING LAMINATED PATTERN SUBSTRATE, AND METHOD FOR MANUFACTURING TOUCH PANEL SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a laminated pattern substrate capable of preventing continuity of a pattern shape of the upper layer from deteriorating at a boundary between areas exposed and not exposed using a second exposure mask.

SOLUTION: A width c1of an end part of an intermediate light shield part 43 of a first exposure mask 40 on a first light shield part 41 side is larger than a width w1of a first upper pattern 31 of a laminated pattern substrate 10, and a width f2of an end part of an intermediate light shield part 53 of a second exposure mask 50 on a first light shield part 51 side is larger than a width w2of a second upper pattern 32 of the laminated pattern substrate 10. Thereby, an intermediate upper pattern 33 having at least a width more than or equal to that of each pattern 31 and 32 can be formed between the first upper pattern 31 and the second upper pattern 32. This can prevent a neck from occurring between the first upper pattern 31 and the second upper pattern 32.

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