| 摘要 |
A MEMS mirror device includes a semiconductor substrate, a mirror provided on the semiconductor substrate, a first cavity, a second cavity, and a frame portion to define the first cavity and the second cavity. The semiconductor substrate further includes a swing portion formed just above the first cavity to support the mirror, a straight beam provided just above the first cavity to extend between the frame portion and the swing portion, a comb-teeth-like fixed electrode, and a comb-teeth-like movable electrode, the movable electrode meshing with the fixed electrode with a gap left therebetween, the swing portion configured to swing about the beam as a swing axis in response to movement of the movable electrode.
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