MEASUREMENT STRUCTURE, METHOD FOR PRODUCING SAME, AND MEASUREMENT METHOD USING SAME

摘要

This measurement structure, which comprises a metal air-gap disposed structure (1) having a plurality of air gaps (11) and a support substrate (2) that supports the air-gap disposed structure (1), is characterized by: being used in a measurement method that measures the characteristics of a measurement subject by radiating electromagnetic waves at the measurement structure at which the measurement subject is held and detecting the frequency characteristics of the electromagnetic waves that pass through the measurement structure or of the electromagnetic waves that are reflected from the measurement structure; at least a portion of the primary surface (10b) on the support substrate (2) side of the air-gap disposed structure (1) being joined to the support substrate (2); and of the primary surfaces (11a, 11b) of the air-gap section (11) of the air-gap disposed structure (1), at least a portion of the primary surface (11b) on the support substrate (2) side not contacting the support substrate (2).