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发明名称
CANTILEVER SENSOR
摘要
申请公布号
KR101187725(B1)
申请公布日期
2012.10.04
申请号
KR20100111444
申请日期
2010.11.10
申请人
发明人
分类号
B81B3/00;B81B7/02;H01L41/08
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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