| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of measuring persulfuric acid concentration with which a persulfuric acid concentration in a persulfuric acid containing sulfuric acid solution can be accurately measured without disturbing the utilization of the persulfuric acid containing sulfuric acid solution after the measurement of the concentration, a persulfuric acid concentration measuring apparatus and a persulfuric acid supplying device with the measuring apparatus. <P>SOLUTION: A persulfuric acid concentration measuring apparatus comprises: an action pole 3a and a reference pole 3b in contact with a persulfuric acid containing sulfuric acid solution; a potentiostat 4 which sweeps a potential of the action pole 3a with respect to the reference pole 3b and measures a response current in that case; an oxidant concentration determination section 5 which determines a full oxidant concentration on the basis of a first current value measured by the potentiostat 4 while the potential of the action pole 3a is a preset negative potential, and determines a hydrogen peroxide concentration on the basis of a second current value measured by the potentiostat 4 while the potential of the action pole 3a is a preset positive potential; and a persulfuric acid concentration determination section 6 which determines the persulfuric acid concentration on the basis of the full oxidant concentration and the hydrogen peroxide concentration determined by the oxidant concentration determination section 5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
