发明名称 |
BETA-KETOIMINE LIGAND, METHOD OF PREPARING THE SAME, METAL COMPLEX COMPRISING THE SAME AND METHOD OF FORMING THIN FILM USING THE SAME |
摘要 |
Theβ-ketoimine ligand is represented by the following formula 1: wherein R1 and R2 are each independently a C1-C5 alkyl group. A metal complex compound includes theβ-ketoimine ligand. A method of forming theβ-ketoimine ligand and a method of forming a thin film using the metal complex compound includingβ-ketoimine ligand are provided.
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申请公布号 |
US2012251724(A1) |
申请公布日期 |
2012.10.04 |
申请号 |
US201213435760 |
申请日期 |
2012.03.30 |
申请人 |
CHO YOUN-JOUNG;WADA SENJI;CHOI JUNG-SIK;LEE JIN-SEO;SAKURAI ATSUSHI;CHO KYOO-CHUL;YOSHINAKA ATSUYA;SATO HARUYOSHI;UEYAMA. JUNJI;YOSHINO TOMOHARU;SHIMIZU MASAKO |
发明人 |
CHO YOUN-JOUNG;WADA SENJI;CHOI JUNG-SIK;LEE JIN-SEO;SAKURAI ATSUSHI;CHO KYOO-CHUL;YOSHINAKA ATSUYA;SATO HARUYOSHI;UEYAMA. JUNJI;YOSHINO TOMOHARU;SHIMIZU MASAKO |
分类号 |
C23C16/06;C07C223/02;C07C249/02;C07C251/08 |
主分类号 |
C23C16/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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