发明名称 BETA-KETOIMINE LIGAND, METHOD OF PREPARING THE SAME, METAL COMPLEX COMPRISING THE SAME AND METHOD OF FORMING THIN FILM USING THE SAME
摘要 Theβ-ketoimine ligand is represented by the following formula 1: wherein R1 and R2 are each independently a C1-C5 alkyl group. A metal complex compound includes theβ-ketoimine ligand. A method of forming theβ-ketoimine ligand and a method of forming a thin film using the metal complex compound includingβ-ketoimine ligand are provided.
申请公布号 US2012251724(A1) 申请公布日期 2012.10.04
申请号 US201213435760 申请日期 2012.03.30
申请人 CHO YOUN-JOUNG;WADA SENJI;CHOI JUNG-SIK;LEE JIN-SEO;SAKURAI ATSUSHI;CHO KYOO-CHUL;YOSHINAKA ATSUYA;SATO HARUYOSHI;UEYAMA. JUNJI;YOSHINO TOMOHARU;SHIMIZU MASAKO 发明人 CHO YOUN-JOUNG;WADA SENJI;CHOI JUNG-SIK;LEE JIN-SEO;SAKURAI ATSUSHI;CHO KYOO-CHUL;YOSHINAKA ATSUYA;SATO HARUYOSHI;UEYAMA. JUNJI;YOSHINO TOMOHARU;SHIMIZU MASAKO
分类号 C23C16/06;C07C223/02;C07C249/02;C07C251/08 主分类号 C23C16/06
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