发明名称 |
DISPLACEMENT MEASUREMENT METHOD AND DISPLACEMENT MEASUREMENT DEVICE |
摘要 |
A displacement measurement device includes a first diffraction grating that generates first diffraction light of a prescribed order; a second diffraction grating movable relative to the first diffraction grating, the second diffraction grating dividing the zeroth-order light that has passed through the first diffraction grating into zeroth-order light and a second diffraction light of a prescribed order; and a first optical sensor that detects interfering light beams formed by the first diffraction light from the first diffraction grating and the second diffraction light from the second diffraction grating to determine an amount of a displacement of the second diffraction grating relative to the first diffraction grating. |
申请公布号 |
US2012250031(A1) |
申请公布日期 |
2012.10.04 |
申请号 |
US201213438615 |
申请日期 |
2012.04.03 |
申请人 |
IKEDA MASATO;OYAMA KATSUHIRO;TAIYO YUDEN CO., LTD. |
发明人 |
IKEDA MASATO;OYAMA KATSUHIRO |
分类号 |
G01B11/02 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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