发明名称 LENS MEASUREMENT DEVICE
摘要 <p>Provided is a lens measurement device capable of rapidly and accurately obtaining the amount of misalignment between two front and back lens surfaces. A lens measurement device is provided with: a collimator lens (53) which makes light emitted from a light source unit (23) collimated light; a reference plate (33) which branches high coherent light (I) into light to be inspected (R2) and reference light (R1); a null mirror (38) which retroreflects the light to be inspected (R2); a rotation mechanism (37) which rotates the null mirror (38) around an optical axis (P0) by 180 degrees with respect to a lens to be inspected (10); an image capturing unit (24) which captures an image of interference fringes between the reference light (R1) and the light to be inspected (R2); an interference fringe analysis unit (44) which analyzes the interference fringes and calculates a wave front aberration caused by passing through the lens to be inspected (10); and a misalignment amount calculation unit (45) which, on the basis of the wave front aberration calculated when the null mirror (38) is located in a predetermined position and the wave front aberration calculated when the null mirror (38) is rotated by 180 degrees, calculates the misalignment between two front and back lens surfaces of the lens to be inspected (10).</p>
申请公布号 WO2012132930(A1) 申请公布日期 2012.10.04
申请号 WO2012JP56693 申请日期 2012.03.15
申请人 FUJIFILM CORPORATION;GE, ZONGTAO;SUN, PING;IWAZAKI, HIROYUKI 发明人 GE, ZONGTAO;SUN, PING;IWAZAKI, HIROYUKI
分类号 G01M11/02;G01B11/00 主分类号 G01M11/02
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