| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a proximity exposure device and proximity exposure method, which enable a mask to be attached to a mask holder without scratching the mask holder. <P>SOLUTION: A mask stage 10 has a mask holder 14 with a suction groove 14a formed to suck and hold an edge part of a mask M by use of a supplied negative pressure. When the mask M is held on the mask stage 10, a film 90 is sandwiched between the mask holder 14 and the mask M. <P>COPYRIGHT: (C)2013,JPO&INPIT |
