摘要 |
A spool is provided with a first discharge air duct connecting the first opening to the first discharge air chamber, and a second discharge air duct connecting the second opening to the second discharge air chamber, where the first discharge air duct and the second discharge air duct are divided by a non-duct part. A first output air pressure chamber is adjacent to a first discharge air chamber with a first diaphragm interposed therebetween, the first discharge air chamber is adjacent to a bias chamber with a second diaphragm interposed therebetween, the bias chamber is adjacent to an input air pressure chamber with a third diaphragm interposed therebetween, the input air pressure chamber is adjacent to a second discharge air chamber with a fourth diaphragm interposed therebetween, and the second discharge air chamber is adjacent to a second output air pressure chamber with a fifth diaphragm interposed therebetween. |