Ceramic pressure measuring cell of pressure sensor, has capacitor that is provided between the electrodes to affect the measuring diaphragm based on applied pressure

摘要

The pressure measuring cell (1) has electrodes (24,44) that are arranged in measuring diaphragm (2) and ceramic power sensor (4) respectively. The measuring diaphragm is connected with base (3) to form a pressure chamber. The ceramic power sensor is provided between the diaphragm and base. A capacitor is provided between the electrodes to affect the measuring diaphragm based on applied pressure. An independent claim is included for pressure sensor.