发明名称 ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN FILM THEREFROM AND METHOD OF FORMING PATTERN USING THE COMPOSITION
摘要 <p>Provided is an actinic-ray- or radiation-sensitive resin composition including a resin (P) containing an acid-decomposable repeating unit (A), which resin when acted on by an acid, increases its solubility in an alkali developer, a compound (Q) that when exposed to actinic rays or radiation, generates an acid, and a compound (R) expressed by general formula (1) or (2) below.</p>
申请公布号 WO2012133939(A1) 申请公布日期 2012.10.04
申请号 WO2012JP59300 申请日期 2012.03.29
申请人 FUJIFILM CORPORATION;TAKAHASHI, TOSHIYA;TAKIZAWA, HIROO;TSUBAKI, HIDEAKI;HIRANO, SHUJI;TSUCHIMURA, TOMOTAKA 发明人 TAKAHASHI, TOSHIYA;TAKIZAWA, HIROO;TSUBAKI, HIDEAKI;HIRANO, SHUJI;TSUCHIMURA, TOMOTAKA
分类号 G03F7/039;G03F7/004;H01L21/027 主分类号 G03F7/039
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