ULTRAPURE WATER PRODUCING SYSTEM AND ULTRAPURE WATER PRODUCING METHOD

摘要

An ultrapure water producing system comprises: a pretreatment unit to which water to be treated is introduced; and an ultrapure water producing unit including a pretreatment bath in which water pretreated at the pretreatment unit is stored, a reverse osmosis membrane device to which pretreated water is introduced from the pretreatment bath, and an electric deionization device, wherein: the pretreatment unit includes an active carbon filter device; the active carbon filter device includes a filter main body having a sheet-shaped member wound in a spiral shape and a filtering bath through which water passes and in which the filter main body is filled with its axis being in the direction of a water flow; the sheet-shaped member is formed by superposing a mesh sheet having holes through which water passes on a sheet surface of a sheet-shaped spacer through which water passes with more difficulty than through the mesh sheet; and at least portions of the mesh sheet and the spacer are formed of an active carbon fiber.