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发明名称
Non-contact air pads for chucking a substrate by using the radial flow
摘要
申请公布号
KR101187684(B1)
申请公布日期
2012.10.04
申请号
KR20100104222
申请日期
2010.10.25
申请人
发明人
分类号
H01L21/677;B25J15/06;B65G47/91;B65G49/06
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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