| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an end effector which can stably hold a substrate and surely conveys the substrate, and to provide a substrate conveying apparatus. <P>SOLUTION: An end effector 4 includes an end effector body 5 and electrorheological elements 6. The end effector body 5 has a mounting surface on which a circular substrate is to be mounted. The electrorheological elements 6 are a plurality of electrorheological elements 6 which are formed into arc shapes having the mutually same radius, and are arranged on a single circle specified on the mounting surface. The electrorheological elements 6 entirely abut on the circular substrate, even when the substrate warps. Thereby, when electric voltage is applied on the electrorheological elements 6, the electrorheological elements 6 are made to tightly contact with the circular substrate, and the end effector can stably hold the circular substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
