| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect detection method with which a defect can be detected accurately even in the case where an object to be examined has a complicated shape, and a defect detection apparatus. <P>SOLUTION: A defect detection method includes an imaging step of imaging an object to be examined, an edge detection step of detecting an edge that is an outer circumferential shape of a structure pattern on the basis of obtained image data, a line detecting step of detecting a line that is an aggregate of outer-most circumferential pixels of the edge, a structure line acquiring step of acquiring structure lines which are lines in contact with a plurality of structure patterns with the edge as a boundary, respectively, an edge width acquiring step of acquiring a distance between two different structure lines as an edge width, an average edge width calculating step of setting arbitrary two points on the same structure line as a starting point and an ending point and acquiring an average edge width from the starting point to the ending point, and a defect detecting step of detecting a defect by comparing the average edge width with the edge width. <P>COPYRIGHT: (C)2013,JPO&INPIT |
