INFORMATION PROCESSING DEVICE, PROCESSING SYSTEM, PROCESSING METHOD, AND PROGRAM
摘要
<p>A computer (2A) processes information relating to a film formation device (20A). When a malfunction occurs in the film formation device (20A), the computer (2A) displays malfunction information relating to the malfunction which has occurred. The computer (2A) accepts handling information relating to handling performed when the malfunction which had occurred was handled. The computer (2A) stores the accepted handling information in association with malfunction specification information for specifying the malfunction which has occurred. The computer (2A) outputs the stored malfunction specification information and the handling information to a server computer (1). When a malfunction occurs in the film formation device (20B), the computer (2B) receives handling information corresponding to the malfunction specification information from the server computer (1), and displays the information.</p>
申请公布号
WO2012132602(A1)
申请公布日期
2012.10.04
申请号
WO2012JP53603
申请日期
2012.02.16
申请人
TOKYO ELECTRON LIMITED;ARAKI, SHINICHIRO;MATSUDA, KATSUHIKO;OKADA, KIMINORI;ITO, TAICHI;NAKAJIMA, SUSUMU;HORIUCHI, NOBUHIRO