发明名称 |
RAPID RESPONSE RELATIVE HUMIDITY SENSOR USING ANODIC ALUMINUM OXIDE FILM |
摘要 |
A rapid response relative humidity sensor based on nano-structured aluminum oxide thin film is disclosed. The main body of the sensor is an anodic aluminum oxide thin film of about 2-20 μm thick formed from an Al substrate which serves as one electrode. A porous metal layer of about 20-200 nm thick is formed over the anodic aluminum oxide thin film and functions as a second electrode. The alumina thin film contains nano-sized channels of about 10-100 nm in diameter, serving as a capacitive relative humidity sensor having high sensitivity and short response time. Thermal annealing at elevated temperature improves the linearity of the capacitance versus humidity curve, giving a full range humidity sensing range. Hysteresis and degradation are negligible for the humidity sensors. |
申请公布号 |
US2012247203(A1) |
申请公布日期 |
2012.10.04 |
申请号 |
US201013380053 |
申请日期 |
2010.12.22 |
申请人 |
NANO AND ADVANCED MATERIALS INSTITUTE LIMITED |
发明人 |
ZHANG CHUN;MIAO JIANYING;WANG NING |
分类号 |
G01N27/22;C23C28/00;C25D11/04 |
主分类号 |
G01N27/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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