发明名称 THE PVA EMBOSSING ROLLER TO ENHANCE A CLEANING POWER OF PVA EMBOSSING ROLLER FOR CLEANING A SEMICONDUCTOR AND THEREOF MANUFACTURING METHOD
摘要 PURPOSE: A PVA(Polyvinyl Acetate) embossing roller for cleaning a semiconductor and a manufacturing method thereof are provided to prevent fine dust from being reabsorbed on the surface of a PVA roller by eliminating a thin film formed on the surface of a protrusion which is generated in the formation process of the PVA embossing roller. CONSTITUTION: A PVA embossing roller is manufactured. A fixing shaft is inserted into a central part of the PVA embossing roller. The PVA embossing roller is fixed to a rotator of a metal processing shelf. A left and right operation part with a grinding stone moves to the front and back and the left and right. A ground PVA embossing roller is separated. [Reference numerals] (AA) Process of manufacturing a PVA embossing roller; (BB) Process of inserting a fixing shaft; (CC) Process of fixing a PVA embossing roller shelf; (DD) Grinding process; (EE) Separation process
申请公布号 KR20120107903(A) 申请公布日期 2012.10.04
申请号 KR20120100824 申请日期 2012.09.12
申请人 YOON, JEONG HYE 发明人 YOON, JEONG HYE
分类号 H01L21/302;B23C3/04 主分类号 H01L21/302
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