| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas discharge laser crystallization apparatus for performing a transformation of crystal growth or orientation in a film on a workpiece. <P>SOLUTION: A laser system is configured as a POPA laser system and further comprises: relay optics operative to direct a first output laser light pulse beam from a first laser PO unit into a second laser PA unit; and a timing and control module timing the creation of a gas discharge in the first and second laser units within plus or minus 3 ns, to produce the a second laser output light pulse beam as an amplification of the first laser output light pulse beam. The system comprises a divergence control part in an oscillator laser unit. The divergence control part comprises an unstable oscillation control part. The system further comprises a beam pointing control mechanism and a beam position control mechanism, between the laser and the workpiece. <P>COPYRIGHT: (C)2013,JPO&INPIT |
