| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma light source system which can extend the lifetime of device by minimizing damage due to thermal load even when the output of plasma light generated is increased significantly. <P>SOLUTION: In a vacuum chamber 21 which is evacuated internally, the plasma light source system comprises: a plurality of plasma light sources 10 emitting plasma light 8 periodically at a plurality of light-emitting points 1a set on the circumference of a circle centered on a central axis 7; a mirror rotating body 40 which reflects the plasma light 8 at each light-emitting point 1a toward a focal point 9 located on the central axis 7; a rotary drive device 48 which rotationally drives the mirror rotating body 40 about the central axis 7; and a cooler 50 which cools the interior of the mirror rotating body 40. <P>COPYRIGHT: (C)2013,JPO&INPIT |
