| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pattern defect detection device that detects a fluorescent image, a diffusion light image, and a reflection light image of a substrate formed by laminating dry films so as to easily detect various defects occurring in an exposure process. <P>SOLUTION: The pattern defect detection device includes a light source 11 for generating and emitting light, a scan mirror 14 for scanning a substrate 20 with the light emitted by the light source 11, a fluorescent light image detection unit 17 for detecting the image of fluorescent light emitted by the substrate 20, and a diffusion light image detection unit 19 for detecting the image of diffusion light diffused by the substrate 20. <P>COPYRIGHT: (C)2013,JPO&INPIT |
