摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure transient phenomenon testing device for precisely and meticulously grasping events about a process reaching fracture nucleus formation, pre-slip and accelerating fracture in dynamic fracture mechanics. <P>SOLUTION: When pressure is applied to a sample 105, acceleration can be precisely measured by measuring the expansion of a piston rod 104 by a laser distance measuring instrument 107. A detailed numerical value is not used in the conventional pressure fracture test. Thus, a new field can be pioneered by presenting accurate and precise test data. A sputtering instrument exists in semiconductor manufacturing, including a quake-free mechanism, and can perform accurate exposure, which is applied to the present invention. <P>COPYRIGHT: (C)2013,JPO&INPIT |