发明名称 MIRROR ARRAY
摘要 A mirror array (22) having a total surface extending perpendicularly to a surface normal (41), comprises a multiplicity of mirror elements (23) each having a reflection surface (36) and at least one degree of freedom of displacement, wherein the totality of the mirror elements (23) form a parqueting of a total reflection surface of the mirror array (22), and wherein the mirror array (22) is embodied modularly as a tile element in such a way that the parqueting of the total reflection surface can be extended by a tiling of a plurality of such mirror arrays (22).
申请公布号 WO2012130768(A2) 申请公布日期 2012.10.04
申请号 WO2012EP55239 申请日期 2012.03.23
申请人 CARL ZEISS SMT GMBH;WALDIS, SEVERIN;LANI, SEBASTIAN;KNAUF, BENEDIKT 发明人 WALDIS, SEVERIN;LANI, SEBASTIAN;KNAUF, BENEDIKT
分类号 G02B7/18 主分类号 G02B7/18
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