A mirror array (22) having a total surface extending perpendicularly to a surface normal (41), comprises a multiplicity of mirror elements (23) each having a reflection surface (36) and at least one degree of freedom of displacement, wherein the totality of the mirror elements (23) form a parqueting of a total reflection surface of the mirror array (22), and wherein the mirror array (22) is embodied modularly as a tile element in such a way that the parqueting of the total reflection surface can be extended by a tiling of a plurality of such mirror arrays (22).
申请公布号
WO2012130768(A2)
申请公布日期
2012.10.04
申请号
WO2012EP55239
申请日期
2012.03.23
申请人
CARL ZEISS SMT GMBH;WALDIS, SEVERIN;LANI, SEBASTIAN;KNAUF, BENEDIKT