Chemical vapor deposition system,申请号EP20110152605-传众专利搜索

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发明名称	Chemical vapor deposition system
摘要
申请公布号	EP2316986(B1)	申请公布日期	2012.10.03
申请号	EP20110152605	申请日期	2002.08.07
申请人	FIRST SOLAR, INC	发明人	FAYKOSH, GARY T.;FOOTE, JAMES B.;HINKLE, JAMES E.
分类号	C23C16/00;C23C16/44;C03C17/00;C23C16/54;H01L21/31	主分类号	C23C16/00
代理机构		代理人
主权项
地址

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