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发明名称
PROBE CARD
摘要
申请公布号
EP1970715(A4)
申请公布日期
2012.10.03
申请号
EP20060835051
申请日期
2006.12.20
申请人
NHK SPRING CO., LTD.
发明人
YAMADA, YOSHIO;NAKAYAMA, HIROSHI;NAGAYA, MITSUHIRO;IMUTA, SHOGO
分类号
G01R1/073;G01R31/28;H01L21/66
主分类号
G01R1/073
代理机构
代理人
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