发明名称
摘要 A substrate is provided with a first wiring layer , an interlayer insulating film on the first wiring layer 111, a hole formed in the interlayer insulating film, a first metal layer covering the hole , a second metal layer formed in the hole , a dielectric insulating film on the first metal layer , and second wiring layers on the dielectric insulating film , wherein the first metal layer constitutes at least part of the lower electrode, an area, facing the lower electrode, of the second wiring layers constitutes the upper electrode, and a capacitor is constructed of the lower electrode, the dielectric insulating film and the upper electrode.
申请公布号 JP5038612(B2) 申请公布日期 2012.10.03
申请号 JP20050285223 申请日期 2005.09.29
申请人 发明人
分类号 H01L27/04;H01L21/768;H01L21/822 主分类号 H01L27/04
代理机构 代理人
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