发明名称 |
SUBSTRATE TRANSPORT APPARATUS |
摘要 |
A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section. |
申请公布号 |
EP1907173(B1) |
申请公布日期 |
2012.10.03 |
申请号 |
EP20060774600 |
申请日期 |
2006.07.07 |
申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
GILCHRIST, ULYSSES;HOFMEISTER, CHRISTOFER |
分类号 |
B25J9/06;B25J9/08;B25J9/10 |
主分类号 |
B25J9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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