| 摘要 |
The inspection apparatus includes a probe having a contact for contacting an electrode of an inspected object and having a built-in heater for correcting dislocation of the contact to the electrode caused by temperature difference between the probe and the inspected object; a tester for testing the probe and supplying electric power to the heater; an electric power supply, provided on the tester, for supplying electric power to the heater; and a temperature control unit for controlling electric power to the heater of the probe through the electric power supply, wherein the electric power supply includes at least one open/close switch for switching power to the heater on and off. A connector has a male connector and a female connector on opposing ends. A continuity-checking device checks supply of electric power to the heater from the electric power supply. |
