Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transporting a carrier gas saturated with the precursor compound for delivery into such CVD reactors.
申请公布号
US8277886(B2)
申请公布日期
2012.10.02
申请号
US20070805175
申请日期
2007.05.22
申请人
SHENAI-KHATKHATE DEODATTA VINAYAK;ROHM AND HAAS ELECTRONIC MATERIALS LLC