发明名称 |
Peripherally engaging electrode carriers and assemblies incorporating the same |
摘要 |
In accordance with one embodiment of the present disclosure, an assembly is provided comprising a multi-component electrode and a peripherally engaging electrode carrier. The peripherally engaging electrode carrier comprises a carrier frame and a plurality of reciprocating electrode supports. The multi-component electrode is positioned in the electrode accommodating aperture of the carrier frame. The backing plate of the electrode comprises a plurality of mounting recesses formed about its periphery. The reciprocating electrode supports can be reciprocated into and out of the mounting recesses. Additional embodiments of broader and narrower scope are contemplated. |
申请公布号 |
US8276604(B2) |
申请公布日期 |
2012.10.02 |
申请号 |
US20080164288 |
申请日期 |
2008.06.30 |
申请人 |
AUGUSTINO JASON;AVOYAN ARMEN;FANG YAN;OUTKA DUANE;SHIH HONG;WHITTEN STEPHEN;LAM RESEARCH CORPORATION |
发明人 |
AUGUSTINO JASON;AVOYAN ARMEN;FANG YAN;OUTKA DUANE;SHIH HONG;WHITTEN STEPHEN |
分类号 |
H05H1/34;C23C16/00;H01J37/02;H01J37/32;H01L21/00 |
主分类号 |
H05H1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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