发明名称 Transport pod interface
摘要 A transport pod interface in one example including a sampling probe connected to a gas analyzer and an actuator coupled with an access door on the transport pod in the coupling position, and that moves said door towards the base of the interface in an retracted position in which the volume of gas to be analyzed contained within the transport pod is accessible by the sampling probe, characterized in that it includes at least one sealing joint configured such that at least when the interface is in the retracted position, the space between the actuator and said base is sealed in such a way as to isolate the volume of gas to be analyzed.
申请公布号 US8276432(B2) 申请公布日期 2012.10.02
申请号 US20080114271 申请日期 2008.05.02
申请人 GODOT ERWAN;ALCATEL LUCENT 发明人 GODOT ERWAN
分类号 G01N7/00;H01L21/677 主分类号 G01N7/00
代理机构 代理人
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