发明名称 Nonvolatile semiconductor memory device
摘要 According to one embodiment, a nonvolatile semiconductor memory device includes a memory unit and a non-memory unit. The memory unit includes a stacked structure including electrode films stacked in a first direction, and a interelectrode insulating film provided between the electrode films, a select gate electrode stacked with the stacked structure along the first direction, a semiconductor pillar piercing the stacked structure and the select gate electrode along the first direction and a pillar portion memory layer provided between the electrode films and the semiconductor pillar. The non-memory unit includes a dummy conductive film including a portion in a layer being identical to at least one of the electrode films, a dummy select gate electrode in a layer being identical to the select gate electrode, a first non-memory unit contact electrode electrically connected to the dummy conductive and a second non-memory unit contact electrode electrically connected to the dummy select gate.
申请公布号 US8278699(B2) 申请公布日期 2012.10.02
申请号 US20100886010 申请日期 2010.09.20
申请人 TANAKA HIROYASU;KATSUMATA RYOTA;KABUSHIKI KAISHA TOSHIBA 发明人 TANAKA HIROYASU;KATSUMATA RYOTA
分类号 H01L29/792 主分类号 H01L29/792
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