| 发明名称 |
Method for preparing IGZO particles and method for preparing IGZO film by using the IGZO particles |
| 摘要 |
A method for preparing IGZO particles and a method for preparing an IGZO thin film by using the IGZO particles are disclosed. The method for preparing the IGZO particles comprises the following steps: (A) providing a solution of metal acid salts, which contains a zinc salt, an indium salt, and a gallium salt; (B) mixing the solution of the metal acid salts with a basic solution to obtain an oxide precursor; and (C) heating the oxide precursor to obtain IGZO particles. |
| 申请公布号 |
US8278140(B2) |
申请公布日期 |
2012.10.02 |
| 申请号 |
US20090591767 |
申请日期 |
2009.12.01 |
| 申请人 |
YANG YA-HUI;YANG SUELI SIDNEY;KAO CHEN-YU;CHOU KAN-SAN;CHEN SINN-WEN;NATIONAL TSING HUA UNIVERSITY |
发明人 |
YANG YA-HUI;YANG SUELI SIDNEY;KAO CHEN-YU;CHOU KAN-SAN;CHEN SINN-WEN |
| 分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
| 代理机构 |
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