HEAT TREATMENT EQUIPMENT WITH DUCT FOR DISCHARGING HOT WIND AND CLEAN ROOM USING THE SAME

摘要

PURPOSE: A heat treatment apparatus with a hot air discharge duct and a clean room using the same are provided to prevent damage to devices around a heat treatment apparatus by letting hot air discharged from the heat treatment apparatus rise by convection into a duct and discharged to a predetermined position. CONSTITUTION: A heat treatment apparatus(110) comprises a chamber(110a), a door(111), and a duct(140). A substrate(50) is loaded in the chamber and thermally treated. The door opens and closes the chamber. The duct is installed above the chamber in order to discharge hot air discharged from the chamber to a predetermined position. One side of the duct is angled so that the sectional area of the duct gradually increases toward the door.