| 摘要 |
<p>PURPOSE: A noncontact conveying plate for a large area panel is provided to minimize the generation of tremor due to vibration generating while transferring a target object, and to properly maintain the floated flatness of the target object. CONSTITUTION: A noncontact conveying plate for a large area panel comprises a lower plate(10), an upper plate(30), a vacuum branch plate, and an air branch plate(20). The lower plate comprises an air port(a1) and a vacuum port through which air and vacuum pressure are respectively supplied from the outside. The lower plate is connected to the vacuum port at the top to form a vacuum chamber. The upper plate comprises an air chamber, air holes, and vacuum holes. The vacuum branch plate is arranged between the lower plate and the upper plate and is connected to the vacuum chamber to form a vacuum load for delivering the vacuum pressure to the vacuum holes. The air branch plate is arranged at the top or the bottom of the vacuum chamber.</p> |
