发明名称 SUBSTRATE CASE AND SUBSTRATE ACCOMMODATION APPARATUS
摘要 A substrate case includes a shaft portion around which a sheet-shaped substrate having a circuit area in which a circuit manufacturing process is performed is wound; and a cover portion that accommodates the substrate in the state of being wound around the shaft portion, the shaft portion having a holding portion that holds an area different from the circuit area at a winding start portion of the substrate.
申请公布号 KR20120107099(A) 申请公布日期 2012.09.28
申请号 KR20127016536 申请日期 2010.12.28
申请人 NIKON CORPORATION 发明人 MIZUTANI HIDEO;KIUCHI TOHRU;KAWAGUCHI TORU;MASUKAWA TAKASHI
分类号 B65H75/14;B65H18/02;H01L21/673 主分类号 B65H75/14
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