摘要 |
The micromechanical component has a substrate (1) with a substrate layer and a seismic mass in form of a compensator (4). The compensator is suspended in a pivoted manner over the substrate layer. The compensator has a rotational axis (3), which runs parallel to the substrate layer. The compensator has a center of mass (10) outside of the rotational axis. The compensator is symmetrically formed in a projection on the substrate layer. The micromechanical component has a material, which is made up of a metal. |