发明名称 SENSORE MICROMECCANICO CON STRUTTURAZIONE SIMMETRICA DELLE SUPERFICI CON RIPARTIZIONE ASIMMETRICA DELLE MASSE
摘要 The micromechanical component has a substrate (1) with a substrate layer and a seismic mass in form of a compensator (4). The compensator is suspended in a pivoted manner over the substrate layer. The compensator has a rotational axis (3), which runs parallel to the substrate layer. The compensator has a center of mass (10) outside of the rotational axis. The compensator is symmetrically formed in a projection on the substrate layer. The micromechanical component has a material, which is made up of a metal.
申请公布号 IT1395514(B1) 申请公布日期 2012.09.28
申请号 IT2009MI01585 申请日期 2009.09.17
申请人 ROBERT BOSCH GMBH 发明人 RABE MAIK
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