| 摘要 |
A vibration sensor for a musical instrument includes a substrate, a first electrode film that is formed on the substrate, a piezoelectric film that is formed on the first electrode film, a second electrode film that is formed on the piezoelectric film, an insulating film that is formed on the second electrode film, and a shield film that is formed on the insulating film, the shield film being made of a conductive material, electrically connected to the first electrode film and insulated from the second electrode film by the insulating film.
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