| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method and manufacturing apparatus of DLC film which achieves both high durability and high corrosion resistance with a small film thickness. <P>SOLUTION: A manufacturing method of DLC film composed of a first layer and a second layer, including steps of forming the first layer, on the film-deposited substrate, by radical particles generated by the thermal decomposition of hydrocarbon raw gas and forming the second layer by ion particles generated in the plasma of the hydrocarbon raw gas. <P>COPYRIGHT: (C)2012,JPO&INPIT |
