Short arc discharge lamp for use as light source for semiconductor testing devices, projectors or exposure devices, has discharge vessel with arc tube part, in which pair of electrodes is arranged opposite to each other

摘要

The short arc discharge lamp has a discharge vessel with an arc tube part (12), in which a pair of electrodes is arranged opposite to each other. The inner surface of the arc tube part forms an outwardly curved bending portion (15) in a cutting plane along the tube axis of the discharge vessel. The inner surface of the arc tube part surrounds the environment of the former electrode.