| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that a thin film transistor formed on a glass substrate is broken because the glass substrate for a liquid crystal display element is easy to be charged, and an ion reduces at re-coupling if polarity of the ion changes quickly and unevenness occurs with the ion if the change is made slowly although a technology for static elimination by blowing ionized gas against the glass substrate is known conventionally. <P>SOLUTION: The substrate processing apparatus includes a lift pin which is present in a stage to lift up a substrate, an ionizer for temporal switching of ion polarity that is generated, a frequency control part for changing frequency at which polarity of the ion is switched, and a lift-up control part which transmits a signal to the frequency control part, for controlling lifting operation of the lift pin. <P>COPYRIGHT: (C)2012,JPO&INPIT |
