发明名称 CYLINDER CABINET AND SEMICONDUCTOR MANUFACTURING SYSTEM
摘要 In a cylinder cabinet of an embodiment, when first pressure in a first gas supply pipe is equal to or less than a predetermined value, a pipe of gas supplied to an external apparatus is switched from the first gas supply pipe to a second gas supply pipe, and when a gas flow rate of gas flowing through the external apparatus is equal to or less than a predetermined value, if a residual gas amount of a first gas container connected to the first gas supply pipe is equal to or more than a predetermined value, the pipe is switched from the second gas supply pipe to the first gas supply pipe.
申请公布号 US2012241088(A1) 申请公布日期 2012.09.27
申请号 US201113238699 申请日期 2011.09.21
申请人 AKIYOSHI SHINJI;KABUSHIKI KAISHA TOSHIBA 发明人 AKIYOSHI SHINJI
分类号 B05C11/10;F16K51/00;H01L21/306 主分类号 B05C11/10
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