发明名称 FLEXIBLE SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME
摘要 <p>This method for producing a flexible semiconductor device is characterized by comprising: (i) a step for forming an insulating layer on one of the main surfaces of a metal foil; (ii) a step for forming a semiconductor layer on the insulating layer, and for forming a source electrode and a drain electrode in so as to come into contact with the semiconductor layer; (iii) a step for forming a flexible film layer in such a manner as to cover the semiconductor layer, the source electrode and the drain electrode; (iv) a step for forming vias in the flexible film layer, thereby obtaining a semiconductor device precursor; and (v) a step for processing the metal foil to form a gate electrode from the metal foil. This method for producing a flexible semiconductor device is further characterized in that, when the metal foil is processed in step (v), a gate electrode is formed in a prescribed position by using at least one of the vias of the semiconductor device precursor as a positioning marker.</p>
申请公布号 WO2012127779(A1) 申请公布日期 2012.09.27
申请号 WO2012JP01151 申请日期 2012.02.21
申请人 PANASONIC CORPORATION;SUZUKI, TAKESHI;HIRANO, KOICHI;MASUDA, SHINOBU 发明人 SUZUKI, TAKESHI;HIRANO, KOICHI;MASUDA, SHINOBU
分类号 H01L21/336;G09F9/00;G09F9/30;H01L21/3213;H01L21/768;H01L23/522;H01L27/32;H01L29/786 主分类号 H01L21/336
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