| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a solid state image pickup device which can improve sensitivity and inhibit color mixture between neighboring cells. <P>SOLUTION: A solid state image pickup device comprises: a semiconductor substrate 1; a light receiving part 2 formed on the semiconductor substrate 1 for converting light beams into signal charge; a light-shielding layer 6 covering an upper side of the semiconductor substrate 1 except an opening 6a formed on a portion corresponding to above the light receiving part 2; a light transmission layer 8a covering the light-shielding layer 6 in such a manner as to block the opening 6a; and a microlens 9c provided above the light transmission layer 8a for condensing incident light In1 to the light receiving part 2. The light transmission layer 8a is composed of a translucent material having a refractive index difference against air larger than a refractive index difference of a silicon oxide against air. In the light transmission layer 8a, an air gap G1 penetrating in a thickness direction at a portion corresponding to at least above a periphery of the opening 6a of the light-shielding layer 6 is formed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
