发明名称 |
SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING THE SAME, METHOD FOR GENERATING MASK DATA, MASK AND COMPUTER READABLE RECORDING MEDIUM |
摘要 |
A semiconductor device has first wiring layers and a plurality of dummy wiring layers that are provided on the same level as the first wiring layers. The semiconductor device defines a row direction, and first virtual linear lines extending in a direction traversing the row direction. The row direction and the first virtual linear lines define an angle of 2-40 degrees, and the dummy wiring layers are disposed in a manner to be located on the first virtual linear lines. The semiconductor device also defines a column direction perpendicular to the row direction, and second virtual linear lines extending in a direction traversing the column direction. The column direction and the second virtual linear lines define an angle of 2-40 degrees, and the dummy wiring layers are disposed in a manner to be located on the second virtual linear lines.
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申请公布号 |
US2012246603(A1) |
申请公布日期 |
2012.09.27 |
申请号 |
US201213485165 |
申请日期 |
2012.05.31 |
申请人 |
MORI KATSUMI;KAWAHARA KEI;KASUYA YOSHIKAZU;SEIKO EPSON CORPORATION |
发明人 |
MORI KATSUMI;KAWAHARA KEI;KASUYA YOSHIKAZU |
分类号 |
G03F1/08;G06F17/50;G03F1/68;G03F1/70;H01L21/027;H01L21/3205;H01L21/768;H01L21/82;H01L23/52;H01L23/522;H01L23/528 |
主分类号 |
G03F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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