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发明名称
APPARATUS FOR INSPECTING SUBSTRATE
摘要
申请公布号
KR101186272(B1)
申请公布日期
2012.09.27
申请号
KR20100125033
申请日期
2010.12.08
申请人
发明人
分类号
H01L21/66;H01L21/677
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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