| 摘要 |
<P>PROBLEM TO BE SOLVED: To set an exposure interval independent of a resolution of drawing data and a period of a pulse signal of an encoder and reduce a deviation between an exposure interval determined by the resolution of the drawing data and an exposure interval determined by the period of the pulse signal of the encoder, thereby improving drawing accuracy. <P>SOLUTION: An exposure device includes an encoder 32 for outputting a pulse signal according to a relative moving distance between a chuck 10 and a light beam irradiation device 20, and detects the relative moving distance between the chuck 10 and the light beam irradiation device 20 based on the pulse signal from the encoder 32. The exposure device sets reference coordinates at a resolution finer than the resolution of the drawing data, calculates the exposure interval determined by the resolution of the drawing data and the exposure interval determined by the period of the pulse signal of the encoder 32 on the reference coordinates, for a targeted reference exposure interval, determines the position coordinates of the chuck 10, and supplies a drive circuit of the light beam irradiation deice 20 with the drawing data according to the position coordinates of the chuck 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
