发明名称 METHOD AND APPARATUS FOR PHYSICAL CONFINEMENT OF A LIQUID MENISCUS OVER A SEMICONDUCTOR WAFER
摘要 Systems, methods and apparatus for making a chemical head including forming a first return chamber in the chemical head, forming a second return chamber in the chemical head, forming a plurality of first return conduits from a head surface to the first return chamber, forming a plurality of second return conduits from a head surface to the second return chamber and wherein at least one of the first return conduits and the second return conduits being formed at a first angle relative to the head surface, the first angle being greater than about 20 degrees to a meniscus plane normal.
申请公布号 US2012240963(A1) 申请公布日期 2012.09.27
申请号 US201113240657 申请日期 2011.09.22
申请人 MAGNI ENRICO;LENZ ERIC;LAM RESEARCH CORP. 发明人 MAGNI ENRICO;LENZ ERIC
分类号 B08B3/04;B23P17/04 主分类号 B08B3/04
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